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Boron Nitride Plate For PVD CVD And Plasma Systems

Materials:

Boron Nitride Ceramic

Product Category:

Customized Ceramic Components

Boron Nitride Plate For PVD CVD and Plasma Systems

The unique combination of highly exceptional thermal, physical, and chemical characteristics of Boron Nitride ceramic makes it ideal for solving tough challenges in a wide range of industrial applications.
Boron Nitride machinable ceramic is made by hot pressing Boron Nitride powders at high temperatures and pressure. Boron Nitride Ceramic can easily be machined into rods, bars, plates, and even intricate custom shapes.

High dielectric strength and high chemical inertness of Boron Nitride even at higher temperatures makes it uniquely qualified for a variety of shielding and insulation components in harsh, high-temperature environments, such as PVD, CVD, and plasma.

BN components such as insulating shrouds and rails, target frames, protective tubes, shields, and liners as well as insulators ensure that the PVD arc remains constrained towards the target, preventing equipment damage. Boron Nitride Ceramic is commonly used as an alternative for pyrolytic Boron Nitride in these applications.

Material Properties:

  • Excellent Thermal Shock Resistance
  • High Electrical Resistivity
  • High Thermal Conductivity
  • Good Chemical Inertness
  • High Temperature Material
  • Excellent Lubricating Properties — Low Coefficient Of Friction
  • Non-Wetting (Without Oxidation)
  • High Dielectric Breakdown Strength
  • Excellent Machinability
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